Basic Requirements of High Quality Titanium Sputtering Target

Purity

Purity is one of the main performance indicators of sputtering targets because it has a great influence on the performance of the film. Taking titanium target as an example, the higher the purity is, the better the corrosion resistance and electrical and optical properties of the sputtered film are. However, in practical applications, the purity requirements of the sputtering targets are not the same. Generally, the purity requirements of industrial targets are not high, but the sputter targets for semiconductors, display devices have very strict requirements–the purity requirements of magnetic film targets are generally 99.9% or more, and the purity of indium oxide and tin oxide in ITO targets is required to be not less than 99.99%.

Titanium (Ti) Sputtering Target
Titanium (Ti) Sputtering Target

 

Impurity content

Sputtering targets are used as the cathode source in sputtering, and impurities in the sputtering targets and O2 and H2O in the pores are the main sources of contamination of the deposited film. Similarly, targets for different applications have different requirements of their impurity contents. For example, titanium sputtering target for semiconductor electrode wiring requires less than 3*10-9 for radioactive elements such as U and Th.

Density

In order to reduce pores in the solids of the target and improve the properties of the sputtered film, the target is usually required to have a higher density. The density of the target not only affects the sputtering rate, but also affects the electrical and optical properties of the film. The high-density target has the advantages of good electrical conductivity, good thermal conductivity and high strength. Therefore, increasing the density of the target is one of the key technologies for sintering the target.

Grain size and its distribution

In general, the target is a polycrystalline structure with a grain size on the order of microns to millimeters. For the same target, the sputtering rate of the fine-grained target is faster than that of the coarse-grained target; and the thickness of the target sputter-deposited film with a smaller difference in grain size (distributed uniformly) is more uniform.

Please visit https://www.sputtertargets.net/ for more information.

Author: SAM Sputter Targets

Stanford Advanced Materials (SAM) Corporation is a global supplier of various sputtering targets such as metals, alloys, oxides, ceramic materials.

8 thoughts on “Basic Requirements of High Quality Titanium Sputtering Target”

  1. If some one needs expert view about running a blog then i
    advise him/her to go to see this webpage, Keep up the good job.

  2. I in addition to my guys were found to be looking at the great key points on your site and instantly developed an awful suspicion I never expressed respect to you for those secrets. All the young boys came absolutely excited to read through them and already have in reality been having fun with those things. I appreciate you for simply being well considerate and then for obtaining variety of useful things most people are really needing to understand about. My sincere regret for not saying thanks to earlier.

  3. I have to voice my admiration for your kindness in support of those people who need help on this idea. Your real commitment to getting the solution all around ended up being astonishingly useful and have in every case made regular people just like me to achieve their pursuits. Your amazing interesting tips and hints entails a whole lot a person like me and substantially more to my office colleagues. Many thanks; from everyone of us.

  4. Thank you for all your valuable work on this web page. My mom delights in going through investigations and it is easy to see why. Many of us notice all about the compelling method you make both useful and interesting tips and hints through the blog and as well as boost response from visitors on this area of interest plus our child is starting to learn a great deal. Take advantage of the remaining portion of the year. Your carrying out a splendid job.

  5. I truly wanted to write a word so as to thank you for all of the magnificent ways you are giving at this website. My prolonged internet search has at the end been compensated with reasonable facts and strategies to share with my relatives. I would express that we visitors are rather fortunate to exist in a good place with many brilliant people with great opinions. I feel really grateful to have used your web site and look forward to many more cool times reading here. Thank you once more for a lot of things.

  6. Thanks so much for providing individuals with remarkably splendid chance to discover important secrets from this web site. It’s usually so pleasing and also packed with a great time for me personally and my office peers to search your site more than 3 times a week to read the latest guidance you will have. Not to mention, I’m so at all times amazed with the astonishing knowledge served by you. Selected 2 ideas in this article are unquestionably the most impressive we have all had.

  7. My wife and i have been joyful when John managed to deal with his web research via the precious recommendations he made using your weblog. It is now and again perplexing to simply continually be giving out hints which usually many people may have been selling. And we fully understand we have the website owner to be grateful to for this. Most of the illustrations you’ve made, the easy blog menu, the friendships your site help to promote – it’s mostly superb, and it’s letting our son and our family imagine that the situation is fun, and that’s especially vital. Thank you for the whole lot!

  8. My wife and i ended up being very thankful when Louis could carry out his inquiry through the ideas he was given when using the weblog. It’s not at all simplistic just to happen to be giving for free concepts most people could have been trying to sell. And we do know we now have you to give thanks to for this. The main illustrations you’ve made, the easy web site menu, the relationships you make it easier to create – it’s many superb, and it’s helping our son in addition to the family consider that this subject matter is satisfying, and that is especially essential. Many thanks for the whole lot!

Leave a Reply

Your email address will not be published. Required fields are marked *