What is ITO (indium tin oxide) Sputtering Target?

As its name suggests, ITO sputtering target mainly contains three elements of indium, tin and oxygen. More specifically, ITO sputtering target is a black-gray ceramic semiconductor (as shown below) formed by a series of production processes after indium oxide and tin oxide powder are mixed in a certain ratio, and then sintered in a high temperature atmosphere (1600 degrees, oxygen sintering).


As one of the most widely used transparent conducting oxides, Indium tin oxide (ITO) has good electrical conductivity and optical transparency. The transmittance and resistance of ITO are controlled by the ratio of In2O3 to SnO2, respectively, and the performance is usually best when SnO2:In2O3=1:9. The most common method for preparing ITO films is physical vapor deposition (PVD). To know more information about PVD technology, please read this article What are the uses of PVD (Physical Vapor Deposition) coating. And, to know more about how to produce ITO target, please read another article Four main molding methods for ITO (Indium Tin Oxide) targets.

ITO target and its derivatives (such as ITO films, ITO glass, etc.) have many applications in various industries. ITO is often used to make transparent conductive coatings for displays such as liquid crystal displays (LCD), flat panel displays, plasma displays, touch panels, and electronic ink applications. ITO thin films are used in organic light-emitting diodes, solar cells, antistatic coatings and EMI shieldings. Apart from electronics industry, ITO is also used for various optical coatings, most notably infrared-reflecting coatings (hot mirrors) for automotive, and sodium vapor lamp glasses.

Stanford Advanced Materials (SAM) Corporation is a global supplier of various sputtering targets and evaporation materials such as metals, alloys, oxides and ceramic materials, which are widely used in multiple industries. We regularly update knowledge and interesting stories of sputtering targets on our website. If you are interested, please visit https://www.sputtertargets.net/ for more information.


Author: SAM Sputter Targets

Stanford Advanced Materials (SAM) Corporation is a global supplier of various sputtering targets such as metals, alloys, oxides, ceramic materials.

30 thoughts on “What is ITO (indium tin oxide) Sputtering Target?”

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